Plasma Chemical Study of a RF Discharge Containing Aluminum Tri-Isopropoxide Using MIR Absorption Spectroscopy Based on External-Cavity Quantum Cascade Lasers
08.27.17 //
Authors: D. Lopatik, S. Niemietz, M. FrÓ§hlich, J. RÓ§pcke, H. Kersten
Journal: Plasma Phys. 52, No. 10/ DOI: 10.1002/ctpp.201200044
Year: 2012
Applications: Plasma
