Plasma Chemical Study of a RF Discharge Containing Aluminum Tri-Isopropoxide Using MIR Absorption Spectroscopy Based on External-Cavity Quantum Cascade Lasers

Plasma Chemical Study of a RF Discharge Containing Aluminum Tri-Isopropoxide Using MIR Absorption Spectroscopy Based on External-Cavity Quantum Cascade Lasers

08.27.17 //

Authors: D. Lopatik, S. Niemietz, M. Frӧhlich, J. Rӧpcke, H. Kersten

Journal: Plasma Phys. 52, No. 10/ DOI: 10.1002/ctpp.201200044

Year: 2012

Applications: Plasma